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Bis(methylcyclopentadienyl)(methyl)(methoxy)zirconium(IV)

双(甲基环戊二烯基)(甲基)(甲氧基)锆(IV)

品牌
Strem
CAS
916597-01-8
货号
40-1028
包装型号
规格纯度
98+%
参考价格
1350 *本价格含增值税费
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数量
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产品名称:
916597-01-8
Bis(methylcyclopentadienyl)(methyl)(methoxy)zirconium(IV)
双(甲基环戊二烯基)(甲基)(甲氧基)锆(IV)
产品介绍:

Technical Notes:

1. Precursor for the atomic layer deposition of zirconium oxide using water or ozone as co -reactants.1-6

References:

1.J. Electrochem. Soc. 2010, 157 (10), G202-G210.

2.Thin Solid Films, 2010, 519 (2), 666-673.

3. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing,

Measurement, and Phenomena, 2009, 27, 389.

4.Chem. Mater., 2008, 20 (17), 5698-5705

5.Chemical vapor deposition, 2008, 14, 358-365

6. Journal of Materials Chemistry, 2008, 28, 3385-3390.

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