三(二甲胺基)铝二聚体

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产品名称：

32093-39-3
Hexakis(dimethylamino)dialuminum
三(二甲胺基)铝二聚体

产品介绍：

Technical Notes:

1. An overlooked atomic layer deposition precursor.

2. Stoichiometric and catalytic Si-N bond formation using the p-block base TDMAA.

References:

1. Journal of Vacuum Science & Technology, A: Vacuum, Surfaces and Films, 2017, 35, 01B1 28/1.

2. Dalton Transactions, 2015, 44, 12112.

Strem

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